Nano Linear Nt・・・h - Seria Mecatronică
IKO Nano Linear is a moving magnet type linear motor table with a magnet and optical linear encoder scale in the steel moving table part, and a stator coil and an optical linear encoder head in the steel bed. For the table guiding parts, an IKO Crossed Roller Way, wellestablished in the area of miniature linear motion rolling guides, is used in combination with a linear motor and highresolution linear encoder to realize highly accurate positioning. Thanks to adoption of a highperformance neodymium magnet, large thrust force can be acquired and therefore highspeed and highly responsive positioning is possible, despite the very small body. In addition, high cleanliness is realized as the mechanical contact part is only the linear motion rolling guide thanks to adoption of a landmark driving method without cables. Nano Linear is an optimal compact positioning mechanism for semiconductor and LCD manufacturing machines, as well as testing and inspection equipment and electronic